Method of fabricating array substrate having color filter on thin film transistor structure

ABSTRACT

A method of forming an array substrate for use in a liquid crystal display device includes forming a gate line, a gate pad, and a gate electrode, forming a first gate insulating layer to cover the gate line, the gate pad, and the gate electrode, forming an active layer and an ohmic contact layer on the first gate insulating layer, forming a data line, a data pad, a source electrode, and a drain electrode, forming a second insulating layer to cover the thin film transistor, forming a black matrix on the second insulating layer to cover the thin film transistor, the gate line, and the data line except a first portion of the drain electrode, forming a third insulating layer to cover the black matrix, patterning the first, second, and third insulating layers, forming a first transparent electrode layer to cover the patterned third insulating layer, coating an adhesive color film on the first transparent electrode layer, irradiating a laser to portions of the adhesive color film corresponding to the pixel region, removing the adhesive color film to form a color film, repeating coating the adhesive color film, irradiating the laser and removing the adhesive color film to form the color film within all of the pixel regions, forming a second transparent electrode to cover the color filter and the first transparent electrode layer, and patterning the first and second transparent electrode layers to form first and second pixel electrodes, a double-layered gate pad terminal, and a double-layered data pad terminal.

The present invention claims the benefit of Korean Patent ApplicationNo. P2002-0082727 filed in Korea on Dec. 23, 2002, which is herebyincorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a display device and a method offabricating a display device, and more particularly, to an arraysubstrate of a liquid crystal display device and a method of making anarray substrate of a liquid crystal display device.

2. Discussion of the Related Art

In general, since flat panel display devices are thin, light weight, andhave low power consumption, they are commonly used as displays ofportable electronic devices. Among the various types of flat paneldisplay devices, liquid crystal display (LCD) devices are commonly usedfor laptop computers and desktop computer monitors because of theirsuperior resolution and their ability to produce high quality coloredimages.

Operation of the LCD devices make use of optical anisotropy andpolarization properties of liquid crystal molecules to generate adesired image. The liquid crystal molecules have a specific alignmentdue to their specific characteristics that can be modified by inducedelectric fields. For example, the electric fields induced to the liquidcrystal molecules can change the alignment of the liquid crystalmolecules, and due to the optical anisotropy of the liquid crystalmolecules, incident light is refracted according to the alignment of theliquid crystal molecules.

The LCD devices include upper and lower substrates having electrodesthat are spaced apart and face into each other, and a liquid crystalmaterial is interposed therebetween. Accordingly, when the electricfield is induced to the liquid crystal material through the electrodesof each substrate, an alignment direction of the liquid crystalmolecules is changed in accordance with the applied voltage to displayimages. By controlling the induced voltage, the LCD device providesvarious light transmittances to display image data.

Among the different types of LCD devices, active matrix LCDs (AM-LCDs)having thin film transistors and pixel electrodes arranged in a matrixform provide high resolution images and superior moving images. Atypical LCD panel has an upper substrate, a lower substrate, and aliquid crystal material layer interposed therebetween. The uppersubstrate, which is commonly referred to as a color filter substrate,includes a common electrode and color filters, and the lower substrate,which is commonly referred to as an array substrate, includes switchingelements, such as thin film transistors (TFT's) and pixel electrodes.

FIG. 1 is an expanded perspective view of a liquid crystal displaydevice according to the related art. In FIG. 1, an LCD device 11includes an upper substrate 5, which is commonly referred to as a colorfilter substrate, and a lower substrate 22, which is commonly referredto as an array substrate, having a liquid crystal material layer 14interposed therebetween. A black matrix 6 and a color filter layer 8 areformed in a shape of an array matrix on the upper substrate 5 thatincludes a plurality of red (R), green (G), and blue (B) color filterssurrounded by the black matrix 6. In addition, a common electrode 18 isformed on the upper substrate 5 to cover the color filter layer 8 andthe black matrix 6.

A plurality of thin film transistors T are formed in a shape of an arraymatrix corresponding to the color filter layer 8 on the lower substrate22, wherein a plurality of crossing gate lines 13 and data lines 15 areperpendicularly positioned such that each TFT T is located adjacent toeach intersection of the gate lines 13 and the data lines 15.Furthermore, a plurality of pixel electrodes 17 are formed on a pixelregion P defined by the gate lines 13 and the data lines 15 of the lowersubstrate 22. The pixel electrode 17 includes a transparent conductivematerial having high transmissivity, such as indium-tin-oxide (ITO) orindium-zinc-oxide (IZO).

In FIG. 1, a storage capacitor C is disposed to correspond to each pixelP and is connected in parallel to each pixel electrode 17. The storagecapacitor C comprises a portion of the gate line 13, which functions asa first capacitor electrode, a storage metal layer 30, which functionsas a second capacitor electrode, and an interposed insulator 16 (in FIG.2). Since the storage metal layer 30 is connected to the pixel electrode17 through a contact hole, the storage capacitor C is electricallycontacted to the pixel electrode 17.

Accordingly, a scanning signal is supplied to a gate electrode of thethin film transistor T through the gate line 13, and a data signal issupplied to a source electrode of the thin film transistor T through thedata line 15. As a result, liquid crystal molecules of the liquidcrystal material layer 14 are aligned and arranged by enablement of thethin film transistor T, and incident light passing through the liquidcrystal layer 14 is controlled to display an image. For example, theelectric fields induced between the pixel and common electrodes 17 and18 re-arrange the liquid crystal molecules of the liquid crystalmaterial layer 14 so that the incident light can be controlled todisplay the desired images in accordance with the induced electricfields.

When fabricating the LCD device 11 of FIG. 1, the upper substrate 5 isaligned with and attached to the lower substrate 22. However, the uppersubstrate 5 may be misaligned with the lower substrate 22 and lightleakage may occur due to a marginal error in attaching the upper andlower substrate 5 and 22.

FIG. 2 is a schematic cross-sectional view along II-II of FIG. 1 showinga pixel of a liquid crystal display device according to the related art.In FIG. 2, the LCD device includes the upper substrate 5, the lowersubstrate 22, and the liquid crystal layer 14, wherein the upper andlower substrates 5 and 22 are spaced apart from each other, and theliquid crystal layer 14 is interposed therebetween. The thin filmtransistor T is formed on the front surface of the lower substrate 22and includes a gate electrode 32, an active layer 34, a source electrode36, and a drain electrode 38. In addition, a gate insulation layer 16 isinterposed between the gate electrode 32 and the active layer 34 toprotect the gate electrode 32 and the gate line 13. As shown in FIG. 1,the gate electrode 32 extends from the gate line 13 and the sourceelectrode 36 extends from the data line 15. The gate, source, and drainelectrodes 32, 36, and 38 are formed of a metallic material while theactive layer 34 is formed of silicon. Furthermore, a passivation layer40 is formed on the thin film transistor T for protection, wherein thepixel electrode 17 is formed of a transparent conductive material and isdisposed on the passivation layer 40 while contacting the drainelectrode 38 and the storage metal layer 30.

As previously described, the gate line 13 functions as a first electrodeof the storage capacitor C and the storage metal layer 30 functions as asecond electrode of the storage capacitor C. Thus, the gate electrode 13and the storage metal layer 30 constitute the storage capacitor C withthe interposed gate insulation layer 16.

In FIG. 2, the upper substrate 5 is spaced apart from the lowersubstrate 22 over the thin film transistor T. On a rear surface of theupper substrate 5, the black matrix 6 is disposed in positionscorresponding to the thin film transistor T, the gate line 13, and thedata line 15. For example, the black matrix 6 is formed along an entiresurface of the upper substrate 5 and has openings corresponding to thepixel electrode 17 of the lower substrate 22, as shown in FIG. 1. Theblack matrix 6 prevents light leakage except for portions of the pixelelectrode 17 and protects the thin film transistor T from the light,thus preventing generation of photo current in the thin film transistorT. The color filter layer 8 is formed on the rear surface of the uppersubstrate 5 to cover the black matrix 6 and includes red 8 a, green 8 b,and blue 8 c colors filters, each corresponding to one pixel region Pwhere the pixel electrode 17 is located. In addition, a common electrode18 formed of a transparent conductive material is disposed on the colorfilter layer 8 over the upper substrate 5.

In FIG. 2, the pixel electrode 17 has a one-to-one correspondence withone of the color filters 8 a, 8 b, and 8 c. Furthermore, in order toprevent a cross-talk between the pixel electrode 17 and the gate anddata lines 13 and 15, the pixel electrode 17 is spaced apart from thedata line 15 by a distance A and from the gate line 13 by a distance B.Accordingly, open spaces within the distances A and B between the pixelelectrode 17 and the data and gate line 15 and 13 cause light leakage inthe LCD device. For example, the light leakage mainly occurs within theopen spaces A and B so that the black matrix 6 formed on the uppersubstrate 5 should cover those open spaces A and B. However, whenarranging the upper substrate 5 with the lower substrate 22 or viceversa, a misalignment may occur between the upper substrate 5 and thelower substrate 22. Thus, the black matrix 6 is extended to fully coverthose open spaces A and B to provide an aligning margin to prevent lightleakage. However, by extending the black matrix, an aperture ratio ofthe liquid crystal panel is reduced as much as the aligning margin ofthe black matrix 6. Moreover, if there are errors in the aligning marginof the black matrix 6, the light leakage still occurs in the open spacesA and B, and deteriorates the image quality of the LCD device.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to an array substrate ofa liquid crystal display device and a method of fabricating an arraysubstrate that substantially obviates one or more of the problems due tolimitations and disadvantages of the related art.

An object of the present invention is to provide a method of fabricatingan array substrate for a liquid crystal display device that provides ahigh aperture ratio.

Another object of the present invention is to provide a method offorming an array substrate for a liquid crystal display device havingsimplified and stabilized fabricating processes to increasemanufacturing yield.

Additional features and advantages of the invention will be set forth inthe description which follows and in part will be apparent from thedescription, or may be learned by practice of the invention. Theobjectives and other advantages of the invention will be realized andattained by the structure particularly pointed out in the writtendescription and claims hereof as well as the appended drawings.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described, a method offorming an array substrate for use in a liquid crystal display deviceincludes forming a gate line on a substrate along a first direction, agate pad at one end of the gate line, and a gate electrode extendingfrom the gate line, forming a first gate insulating layer on thesubstrate to cover the gate line, the gate pad, and the gate electrode,forming an active layer of intrinsic amorphous silicon and an ohmiccontact layer of extrinsic amorphous silicon layer sequentially on thefirst gate insulating layer over the gate electrode, forming a dataline, a data pad, a source electrode, and a drain electrode, the dataline disposed extending along a second direction to perpendicularlycross the gate line to define a pixel region, the data pad disposed atone end of the data line, the source electrode extending from the dataline on a first portion of the ohmic contact layer, and the drainelectrode spaced apart from the source electrode on a second portion ofthe ohmic contact layer to form a thin film transistor, forming a secondinsulating layer over an entire surface of the substrate to cover thethin film transistor, forming a black matrix on the second insulatinglayer to cover the thin film transistor, the gate line, and the dataline except a first portion of the drain electrode, forming a thirdinsulating layer over an entire surface of the substrate to cover theblack matrix, patterning the first, second, and third insulating layersto expose the first portion of drain electrode, to form a gate padcontact hole exposing the gate pad, and to form a data pad contact holeexposing the data pad, forming a first transparent electrode layer overan entire surface of the substrate to cover the patterned thirdinsulating layer and contacting the exposed first portion of the drainelectrode, coating an adhesive color film on the first transparentelectrode layer, the adhesive color film having a color resin on asurface facing the first transparent electrode layer, irradiating alaser to portions of the adhesive color film corresponding to the pixelregion, removing the adhesive color film after irradiating the laser toform a color film within the pixel region wherein the laser isirradiated, repeating coating the adhesive color film, irradiating thelaser and removing the adhesive color film to form the color film withinall of the pixel regions, forming a second transparent electrode layerover an entire surface of the substrate to cover the color filter andthe first transparent electrode layer, and patterning the first andsecond transparent electrode layers to form first and second pixelelectrodes, a double-layered gate pad terminal, and a double-layereddata pad terminal.

In another aspect, a method of forming an array substrate device for usein a liquid crystal display device includes forming a gate line on asubstrate along a first direction, the gate line including a gate pad atone end thereof, forming a first insulating layer on the substrate tocover the gate line, forming a data line over the first insulating layeralong a second direction perpendicular to the first direction on thesubstrate, the data line defining a pixel region with the gate line andincluding a data pad at one end thereof, forming a thin film transistorat a crossing region of the gate and data lines, the thin filmtransistor including a gate electrode, a semiconductor layer, a sourceelectrode, and a drain electrode, forming a black matrix overlapping thethin film transistor, the gate line, and the data line except a firstportion of the drain electrode, forming a second insulating layer overan entire surface of the substrate to cover the black matrix, patterningthe first and second insulating layers to expose the first portion ofdrain electrode, to form a gate pad contact hole exposing the gate pad,and to form a data pad contact hole exposing the data pad, forming afirst transparent electrode layer over an entire surface of thesubstrate to cover the patterned second insulating layer and contactingthe exposed first portion of the drain electrode, dropping a liquid-typecolor resin onto the first transparent electrode layer within the pixelregion to form a color filter within the pixel region, forming a secondtransparent electrode layer over an entire surface of the substrate tocover the color filter and the first transparent electrode layer, andpatterning the first and second transparent electrode layers to formfirst and second pixel electrodes, a double-layered gate pad terminal,and a double-layered data pad terminal.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this application, illustrate embodiments of the invention andtogether with the description serve to explain the principle of theinvention. In the drawings:

FIG. 1 is an expanded perspective view of a liquid crystal displaydevice according to the related art;

FIG. 2 is a schematic cross-sectional view along II-II of FIG. 1 showinga pixel of a liquid crystal display device according to the related art;

FIG. 3 is a partially enlarged plan view of an exemplary array substrateaccording to the present invention;

FIGS. 4A-4G are cross-sectional views along IV-IV of FIG. 3 showingexemplary fabrication process steps according to the present invention;

FIGS. 5A-5G are cross sectional views along V-V of FIG. 3 showingexemplary fabrication process steps according to the present invention;

FIGS. 6A-6G are cross sectional views along VI-VI of FIG. 3 showingexemplary fabrication process steps according to the present invention;and

FIG. 7 is a cross sectional view of an exemplary pixel of an arraysubstrate according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made in detail to the illustrated embodiments ofthe present invention, examples of which are illustrated in theaccompanying drawings. Wherever possible, the same reference number willbe used throughout the drawings to refer to the same or like parts.

FIG. 3 is a partially enlarged plan view of an exemplary array substrateaccording to the present invention. In FIG. 3, an array substrate 100may include a plurality of gate lines 102 disposed along a transversedirection and a plurality of data lines 118 disposed along alongitudinal direction, wherein the plurality of gate lines 102 and theplurality of data lines 118 cross one another to define a pixel regionP. Each gate line 102 and each data line 118 may include a gate pad 106and a data pad 120, respectively, disposed at ends of each gate line 102and at ends of each data line 118. Over the gate pad 106, is disposed adouble-layered gate pad terminal having first and second gate pads 150and 152. Over the data pad 120, is disposed a double-layered data padterminal having first and second data pads 154 and 156. In addition, athin film transistor T may be formed at each crossing portion of thegate line 102 and the data line 118, and may include a gate electrode104, an active layer 110, a source electrode 114, and a drain electrode116.

Within the pixel regions P defined by the plurality of gate lines anddata lines 102 and 118, a plurality of red (R), green (G), and blue (B)color filters 140 a, 140 b, and 140 c may be located therein. Inaddition, a double-layered pixel electrode structure including first andsecond pixel electrodes 146 and 148 may be disposed corresponding toeach pixel region P. The first pixel electrode 146 and the second pixelelectrode 148 may have similar shapes. Alternatively, the first pixelelectrode 146 and the second pixel electrode 148 may have dissimilarshapes. Although not shown, the first pixel electrode 146 may bedisposed beneath the color filter 140 and may contact the drainelectrode 116, and the second pixel electrode 148 may be disposed on thecolor filter 140 and may contact the first pixel electrode 146.Accordingly, the color filter 140 may be located between the first andsecond pixel electrodes 146 and 148, and the second pixel electrode 148may electrically contact the drain electrode 116 through the first pixelelectrode 146.

In FIG. 3, a storage capacitor CST may be provided within a portion ofthe gate line 102 and a storage metal layer 122. Accordingly, theportion of the gate line 102 may function as a first electrode of thestorage capacitor C_(ST), and the storage metal layer 122 may functionas a second electrode of the storage capacitor C_(ST). In addition, thefirst and second pixel electrodes 146 and 148 may electrically contactthe storage metal layer 122 such that they may be electrically connectedto the storage capacitor C_(ST) in parallel.

In FIG. 3, the array substrate 100 may include a color filter-on-thinfilm transistor (COT) structure. In such a COT structure, a black matrix128 and the color filters 134 may be formed on the array substrate 100.The black matrix 128 may be disposed to correspond to the thin filmtransistors T, the gate lines 102, and the data lines 118 to preventlight leakage in the LCD device. The black matrix 128 may be formed ofan opaque organic material, thereby blocking the light incident to thethin film transistors T and protecting the thin film transistors T fromexternal impact. In the present invention, the color filters 140 may beformed by a thermal imaging method where a color film adheres to thearray substrate to become a color filter. Alternatively, an inkjetmethod is used to form the color filters 140. Those methods will beexplained later in this specification.

In FIG. 3, a gate pad contact hole 132 and a data pad contact hole 134may be provided to expose the gate pad 106 and the data pad 120,respectively. A process for forming the gate and data pad contact holes132 and 134 may be performed before formation of the double-layerstructure of the pixel electrodes 146 and 148 and the color filters 140.

FIGS. 4A-4G are cross-sectional views along IV-IV of FIG. 3 showingexemplary fabrication process steps according to the present invention,FIGS. 5A-5G are cross sectional views along V-V of FIG. 3 showingexemplary fabrication process steps according to the present invention,and FIGS. 6A-6G are cross sectional views along VI-VI of FIG. 3 showingexemplary fabrication process steps according to the present invention.

In FIGS. 4A, 5A, and 6A, a first metal layer may be deposited onto asurface of a substrate 100, and then patterned using a mask process toform a gate line 102, a gate electrode 104, and a gate pad 106. Asmentioned before, the gate pad 106 may be disposed at the end of thegate line 102, and the gate electrode 104 may extend from the gate line102. The first metal layer may include aluminum-based material(s) havinglow electrical resistance in order to prevent signal delay.

After formation of the gate line 102, the gate electrode 104, and thegate pad 106 on the substrate 100, a gate insulation layer 108 (or afirst insulating layer) may be formed on the substrate 100 to cover thegate line 102, the gate electrode 104, and the gate pad 106. The gateinsulation layer 108 may include inorganic material(s), such as siliconnitride (SiN_(x)) and silicon oxide (SiO₂). Then, an intrinsic amorphoussilicon layer (e.g., a-Si:H) and a doped amorphous silicon layer (e.g.,n⁺ a-Si:H) may be sequentially deposited along an entire surface of thegate insulation layer 108, and may be simultaneously patterned using amask process to form an active layer 110 and an ohmic contact layer 112.The ohmic contact layer 112 may be located on the active layer 110 overthe gate electrode 104.

In FIGS. 4B, 5B, and 6B, after forming the active layer 110 and theohmic contact layer 112, a second metal layer may be deposited over thesubstrate 100, and then patterned using a mask process to form a sourceelectrode 114, a drain electrode 116, a data line 118, a storage metallayer 122, and a data pad 120. The second metal layer may include atleast one of chromium (Cr), molybdenum (Mo), tungsten (W), titanium(Ti), copper (Cu), and an alloy of any combination thereof. The sourceelectrode 114 may extend from the data line 118 and may contact oneportion of the ohmic contact layer 112. The drain electrode 116 may bespaced apart from the source electrode 114 and may contact anotherportion of the ohmic contact layer 112. In addition, the storage metallayer 122 may overlap a portion of the gate line 102, and the data pad120 may be connected to the data line 118 at the end of the data line118.

Next, a portion of the ohmic contact layer 112 located between thesource and drain electrodes 114 and 116 may be etched using the sourceand drain electrodes 114 and 116 as masks. Accordingly, a thin filmtransistor T and a storage capacitor C_(ST) (in FIG. 3) may be formed,wherein the thin film transistor T may include the gate electrode 104,the active layer 110, the ohmic contact layer 112, the source electrode114, and the drain electrode 116, and the storage capacitor C_(ST) (inFIG. 3) may include of the gate line 102, the storage metal layer 122,and the interposed first insulating layer 108.

Then, a second insulating layer 124 may be deposited along an entiresurface of the substrate 100 to cover the patterned second metal layer.The second insulating layer 124 may be formed of silicon nitride(SiN_(x)) or silicon oxide (SiO₂) and may enhance adhesion of an organiclayer to be subsequently formed. The second insulating layer 124prevents insufficient contact between the active layer 110 and thesubsequently-formed organic layer. However, if contact between theactive layer 110 and the subsequently-formed organic layer issufficient, the second insulating layer 124 may not be necessary.

In FIGS. 4C, 5C, and 6C, an opaque organic material 126 having a lowdielectric constant may be deposited on the second insulating layer 124,wherein the opaque organic material 126 may have a black color tofunction as a black matrix. Then, the opaque organic material 126 formedon the second insulating layer 124 may be patterned using a maskprocess. Accordingly, a black matrix 128 may be formed over the thinfilm transistor T, the data line 118, and the gate line 102 that aredisposed in a display area. Since the black matrix 128 includes organicmaterial(s), it may provide protection to the thin film transistor T. Inaddition, the black matrix 128 may cover a portion of the storage metallayer 122, thereby protecting the storage capacitor C_(ST) (in FIG. 3).

In FIGS. 4D, 5D, and 6D, a third insulating layer 130 may be formedalong an entire surface of the substrate 100 to cover the black matrix128. The third insulating layer 130 may include inorganic insulatingmaterial(s), such as silicon nitride (SiN_(x)) or silicon oxide (SiO₂).

In FIGS. 4E, 5E, and 6E, the first, second, and third insulating layers108, 124 and 130 may be simultaneously patterned within the pixel regionP using a mask process. Accordingly, an end side portion of the drainelectrode 106 and an end side portion of the storage metal layer 122 maybe exposed. Although FIG. 4E shows that the substrate 100 may be exposedby patterning the first insulating layer 108, the first insulating layer108 may remain and only the second and third insulating layers 124 and130 may be patterned to expose the side portions of the drain electrode106 and storage metal layer 122. Furthermore, remaining portions of thefirst insulating layer 108 on the substrate 100 may control a height ofa subsequently-formed color filter. During patterning of the first,second, and third insulating layers 108, 124, and 130 in the pixelregion P, portions of the first, second, and third insulating layers108, 124, and 130 may be patterned so that the gate pad contact hole 132and the data pad contact hole 134 are formed to expose the gate and datapads 106 and 120, as shown in FIGS. 5E and 6E.

In FIGS. 4F, 5F and 6F, a first transparent electrode layer 136 may beformed by depositing at least one of indium tin oxide (ITO) and indiumzinc oxide (IZO) along an entire surface of the substrate 100 to coverthe patterned third insulating layer 130 and to contact the exposed sideportions of the drain electrode 106 and storage metal layer 122. Next,an adhesive color film 137, upon which a red color resin 138 may becoated, may be adhered to the first transparent electrode layer 136, andmay include a material capable of converting light energy into thermalenergy. Then, the color resin 138 may cured by the thermal energy duringa laser irradiation process.

For example, as shown in FIG. 4F, the adhesive color film 137 having thecolor resin 138 thereon may be first disposed on the first transparentelectrode layer 136, and then partially irradiated with a laser,especially portions that correspond to the pixel region P. Accordingly,the irradiated portions of the adhesive color film 137 may convert thelaser energy into the thermal energy, and the desired portions of thecolor film 138 may be cured by the thermal energy and may be adhered tothe first transparent electrode layer 136.

After the laser irradiation process, the color film 137 may be removedfrom the substrate 100 so that the desired color films 140 a remain inregions corresponding to the desired pixel regions P. The laser may bean infrared ray or a visible ray (300-1500 nm) laser, and may be asolid, semiconductor, or gas laser. The energy density of the laser mayrange from about 0.01 mJ/cm² to about 10 mJ/cm² in order to transcribethe pigment in the color film 138 onto the glass substrate 100. Thismethod of forming the color filter films 140 a is referred to as athermal imaging method. Repetition of the above-described thermalimaging method may be used to form each of the color filters 140 a, 140b, and 140 c, respectively, as shown in FIG. 3, wherein each of thecolor filters 140 a, 140 b, and 140 c correspond to each of the pixelregions P (in FIG. 3).

In FIGS. 4G, 5G and 6G, after forming each of the color filters 140 a,140 b, and 140 c, a second transparent layer 142 may be formed along anentire surface of the substrate 100 to contact each of the color filters140 a, 140 b, and 140 c and the exposed portions of the firsttransparent electrode layer 136. The second transparent electrode layer142 may include at least one of indium tin oxide and indium zinc oxidesimilar to the first transparent electrode layer 136. In FIG. 4G, thesecond transparent electrode layer 142 may contact the first transparentelectrode layer 136 at both sides of each of the color filters 140 a,140 b, and 140 c.

In addition, the first and second transparent electrode layers 136 and142 may be simultaneously patterned to form a double-layered pixelelectrode (i.e., sandwich pixel electrode) that may include the firstand second pixel electrodes 146 and 148 (in FIG. 3). The first andsecond transparent electrode layers 136 and 142 may be simultaneouslypatterned using a common mask, so that the sandwich pixel electrode maybe formed corresponding to each of the pixel regions P. Alternatively,the first transparent electrode layer 136 may be patterned, the colorfilters may be formed thereon, and then the second transparent electrodelayer 142 may be patterned. Each of the color filters 140 a, 140 b, and140 c may be interposed within the sandwich pixel electrode so that thecolor filter 140 may be located between the first and second pixelelectrodes 146 and 148 (in FIG. 3).

In FIG. 4G, the second pixel electrode 148 may contact the first pixelelectrode 146 at both sides of the color filter 140. Accordingly, asshown in FIG. 3, the sandwich pixel electrode may contact the thin filmtransistor T and may be connected in parallel to the storage capacitorC_(ST).

In FIGS. 5G and 6G, when forming the sandwich pixel electrode of thefirst and second pixel electrodes 146 and 148 (in FIG. 4G), the firstand second transparent electrode layers 136 and 142 may be disposed overthe gate and data pads 106 and 120 and also may be patterned to form adouble-layered gate pad terminal and a double-layered data pad terminal,respectively, over the gate pad 106 and over the data pad 120. Thedouble-layered gate pad terminal may comprise the first and second gatepad terminals 150 and 152, and the double-layered data pad terminal maycomprise the first and second data pad terminals 154 and 156.Accordingly, the array substrate for use in a liquid crystal displaydevice, and more particularly, the color filters of the array substratehaving the COT structure may be formed using the thermal imaging method.Alternatively, with reference to FIG. 4F, the thermal imaging method forforming the color filter may use an inkjet method.

FIG. 7 is a cross sectional view of an exemplary pixel of an arraysubstrate according to the present invention. FIG. 7 illustrates a stepof forming the color filter that may be replaced for the step shown inFIG. 4F, wherein other processes of forming the array substrate may besimilar to those shown in FIGS. 4A-4G except for the step of forming thecolor filter.

In FIG. 7, the thin film transistor T, which may include the gateelectrode, the active layer 110, and the source and drain electrodes 114and 116, may be placed on the substrate 100. The gate line 102 also maybe placed on the substrate 100, and the data line 118 may be formed onthe first insulating layer 108. In addition, the storage metal layer 122may be formed on the first insulating layer 108, especially over thegate line 102. The second insulating layer 124 may cover the thin filmtransistor T and the storage metal layer 122, except for portions of thedrain electrode 116 and storage metal layer 122. The black matrix 128may be disposed corresponding to the thin film transistor T, the dataline 118, and the gate line 102, and a the third insulating layer 130may cover the black matrix 128. As described with reference to FIGS. 4Ato 4G, the second and third insulating layers 124 and 130 may exposeportions of the drain electrode 116 and portions of the storage metallayer 122, so that the first transparent electrode layer 136 may beformed to contact both the drain electrode 116 and the storage metallayer 122.

After forming the first transparent electrode layer 136, the colorfilter may be formed within the pixel region P using an inkjet methodthat drops a liquid-type color resin 201 into a desired one of the pixelregions P, wherein the dropped color resin 201 may be cured to be adesired color filter within the pixel region P. At this time, the blackmatrix 128 may function as a bulkhead that prevents leakage of thedropped liquid-type color resin 210. For example, the black matrix 128may have a height of less than about 4 micrometers.

The liquid-type color resin 210 may be contained within an inkjet head200, and may be injected through a nozzle 202 as a micro-droplet,wherein one micro-droplet of the color resin 210 may be about 0.4picoliters (pl) to about 400 picoliters (pl). If a multi-inkjet head isused in the inkjet method, the plurality of color filters can besimultaneously formed within each of the plurality of pixel regions P.When the liquid-type color resin 210 is dropped, the liquid-type colorresin 210 may include a solvent, wherein the solvent may be evaporatedafter the dropping process. The liquid-type color resin 210 may be curedto become the color filter. Accordingly, the color filters 140 (in FIG.3) having red (R), green (G), and blue (B) colors may be complete,wherein the process of forming the double-layered pixel electrode, afterthe inkjet method, may be the same as the process of FIG. 4G.

According to the present invention, the method of forming the colorfilters using the thermal imaging method or the inkjet method can savethe quantity of the color resin. Furthermore, since a developer andstripper may not be used for forming the color filter, the gate and datapads and other layer elements may not become damaged during thefabrication process, thereby stabilizing the fabrication process of thearray substrate, simplifying the fabrication process, and reducingproduction costs. Moreover, since the black matrix and color filters maybe formed on the array substrate, an aligning margin between lower andupper substrates may not be necessary, thereby increasing an apertureratio.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the array substrate forliquid crystal display device and method of fabricating the same of thepresent invention without departing from the spirit or scope of theinvention. Thus, it is intended that the present invention covers themodifications and variations of this invention provided they come withinthe scope of the appended claims and their equivalents.

1-17. (canceled)
 18. A method of forming an array substrate device foruse in a liquid crystal display device, comprising: forming a gate lineon a substrate along a first direction, the gate line including a gatepad at one end thereof; forming a first insulating layer on thesubstrate to cover the gate line; forming a data line over the firstinsulating layer along a second direction perpendicular to the firstdirection on the substrate, the data line defining a pixel region withthe gate line and including a data pad at one end thereof; forming athin film transistor at a crossing region of the gate and data lines,the thin film transistor including a gate electrode, a semiconductorlayer, a source electrode, and a drain electrode; forming a black matrixoverlapping the thin film transistor, the gate line, and the data lineexcept a first portion of the drain electrode; forming a secondinsulating layer over an entire surface of the substrate to cover theblack matrix; patterning the first and second insulating layers toexpose the first portion of drain electrode, to form a gate pad contacthole exposing the gate pad, and to form a data pad contact hole exposingthe data pad; forming a first transparent electrode layer over an entiresurface of the substrate to cover the patterned second insulating layerand contacting the exposed first portion of the drain electrode;dropping a liquid-type color resin onto the first transparent electrodelayer within the pixel region to form a color filter within the pixelregion; forming a second transparent electrode layer over an entiresurface of the substrate to cover the color filter and the firsttransparent electrode layer; and patterning the first and secondtransparent electrode layers to form first and second pixel electrodes,a double-layered gate pad terminal, and a double-layered data padterminal.
 19. The method according to claim 18, wherein dropping theliquid-type color resin includes an inkjet head having a nozzle.
 20. Themethod according to claim 18, wherein the liquid-type color resinincludes a solvent.
 21. The method according to claim 19, wherein onemicro-droplet of the liquid-type color resin injected through the nozzleinto the pixel region ranges from about 0.4 picoliters (pl) to about 400picoliters (pl).
 22. The method according to claim 18, wherein the blackmatrix includes an opaque organic material having a low dielectricconstant.
 23. The method according to claim 18, wherein the liquid-typecolor resin includes one of red, green, and blue colors.
 24. The methodaccording to claim 18, wherein the first and second pixel electrodesform a sandwich pixel electrode structure.
 25. The method according toclaim 18, wherein the color filter is interposed between the first andsecond pixel electrodes.
 26. The method according to claim 18, furthercomprising forming an additional insulating layer between the thin filmtransistor and the black matrix.
 27. The method according to claim 18,wherein each of the first and second insulating layers include one ofsilicon nitride and silicon oxide.
 28. The method according to claim 18,wherein each of the first and second transparent electrode layersincludes at least one of indium tin oxide and indium zinc oxide.
 29. Themethod according to claim 18, wherein forming the data line includesforming a storage metal layer on the first insulating layer over thegate line.
 30. The method according to claim 29, wherein the secondinsulating layer exposes a first portion of the storage metal layer. 31.The method according to claim 30, wherein the first pixel electrodecontacts the exposed first portion of the storage metal layer.
 32. Themethod according to claim 29, wherein the storage metal layer and aportion of the gate line constitute a storage capacitor with the firstinsulating layer interposed between the storage metal layer and the gateline.
 33. The method according to claim 18, wherein the first pixelelectrode directly contacts the substrate.